OPTICAL DIGITAL MEASURING SYSTEMS        
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RESEARCH
Automated optical digital linearity deviation meter
New concept of angle measurement; Simulation and experimental studies
Linear and engular measurements using CCD cameras
Precision of image positioning by CCD camera
Digital Two-Dimensional Autocollimator with resolution 0.001” of engle
Calibration of Digital Two-Dimensional Autocollimator
Metrological research and selection of target shape in digital measuring systems
Linewidth Measurement in Optical and Atomic-force Microscope for Metrological Control of Photomasks
Measurement of diameter and geometry of precision ball bearings
Measurement and correction of distortion in coordinate measurements by CCD camera
   
RESEARCH

Distortion Measurement and Correction for Coordinate Metrology with CCD-Camera

Optical diagram: 1 – CCD matrix, 2 – lens (focal length f = 20 mm), 3 – photomask with object, 4 – light-emitting diode

Set of dot patterns on CCD matrix to examine stability of dots positioning relative to array of readings (dot matrix 10x7)

Deviation of dot coordinates from estimates due to distortion, shown as isolines (in increments of 2.1 mcm)